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US Patent Issued to Hitachi High-Tech on Aug. 18 for "Charged particle beam device and imaging method" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,149, issued on Aug. 18, was assigned to Hitachi High-Tech Corp. (Tokyo). "Charged particle beam device and imaging method" was invented by ... Read More


US Patent Issued to HAMAMATSU PHOTONICS on Aug. 18 for "Electron beam monitoring device and electron beam irradiation system" (Japanese Inventor)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,150, issued on Aug. 18, was assigned to HAMAMATSU PHOTONICS K.K. (Hamamatsu, Japan). "Electron beam monitoring device and electron beam irr... Read More


US Patent Issued to Applied Materials on Aug. 18 for "Radiation heating to dry moisture from air bearing shaft" (Massachusetts Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,151, issued on Aug. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Radiation heating to dry moisture from air bearing s... Read More


US Patent Issued to Tokyo Electron on Aug. 18 for "System and method for plasma processing" (New York Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,152, issued on Aug. 18, was assigned to Tokyo Electron Ltd. (Tokyo). "System and method for plasma processing" was invented by Sergey Voron... Read More


US Patent Issued to SEMES on Aug. 18 for "Impedance matching circuit, power supply apparatus, and plasma processing equipment including same" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,153, issued on Aug. 18, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea). "Impedance matching circuit, power supply apparatus, and ... Read More


US Patent Issued to SAMSUNG ELECTRONICS, POSTECH RESEARCH AND BUSINESS DEVELOPMENT FOUNDATION on Aug. 18 for "Plasma apparatus" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,154, issued on Aug. 18, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea) and POSTECH RESEARCH AND BUSINESS DEVELOPMENT F... Read More


US Patent Issued to Applied Materials on Aug. 18 for "PEALD titanium nitride with direct microwave plasma" (California Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,155, issued on Aug. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "PEALD titanium nitride with direct microwave plasma"... Read More


US Patent Issued to SAMSUNG ELECTRONICS on Aug. 18 for "Substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,156, issued on Aug. 18, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea). "Substrate processing apparatus" was invented... Read More


US Patent Issued to Tokyo Electron on Aug. 18 for "Semiconductor manufacturing apparatus and component for semiconductor manufacturing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,157, issued on Aug. 18, was assigned to Tokyo Electron Ltd. (Tokyo). "Semiconductor manufacturing apparatus and component for semiconductor... Read More


US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on Aug. 18 for "Method for forming semiconductor device structure" (Taiwanese Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,158, issued on Aug. 18, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan). "Method for forming semiconducto... Read More